| Sense directions | ±X,±Y,±Z |
| Stylus overtravel | X and Y: ±18° |
| Z: 11 mm (0.43 in) | |
| Stylus trigger force | X and Y: 6 gf |
| Z: 260 gf | |
| Unidirectional repeatability | 0.25 μm (0.00001 in) |
To obtain optimal metrology performance, the following carbon fiber styli are recommended. Refer to the Styli section for more details.
| Stylus | Part number | |
| 6 × 50 mm CF | A-5003-7306 | 6 x 6 x 6 inches, 1 lbs |
| 6 × 100 mm CF | A-5003-6510 | 6 x 6 x 6 inches, 1 lbs |
| 6 × 150 mm CF | A-5003-6511 | 6 x 6 x 6 inches, 1 lbs |
| 6 × 200 mm CF | A-5003-6512 | 6 x 6 x 6 inches, 1 lbs |