Sense directions | ±X,±Y,±Z |
Stylus overtravel | X and Y: ±15° |
Z: 11 mm (0.43 in) | |
Stylus trigger force | X and Y: 15 gf |
Z: 178 gf | |
Unidirectional repeatability | 0.25 μm (0.00001 in) |
To obtain optimal metrology performance, the following carbon fiber styli are recommended.
Stylus Part number
6 × 50 mm CF A-5003-7306
6 × 100 mm CF A-5003-6510
6 × 150 mm CF A-5003-6511
6 × 200 mm CF A-5003-6512